eFUSE失效分析與可靠性電路設(shè)計(jì)
2022年電子技術(shù)應(yīng)用第12期
晏 穎 1,曹玉升 1,張 睿 2
1. 上海飛聚微電子有限公司,上海 201316;2. 浙江大學(xué) 微納電子學(xué)院,浙江 杭州 310014
摘要: 電編程熔絲(eFUSE)基于電子遷移原理,通過熔斷熔絲使其電阻特性發(fā)生不可逆改變來實(shí)現(xiàn)編程操作。提高可靠性是 eFUSE 系統(tǒng)和電路優(yōu)化設(shè)計(jì)的核心目標(biāo)。從 eFUSE 工作原理以及失效模式分析入手,重點(diǎn)介紹了影響其可靠性的系統(tǒng)原因和主要機(jī)理及過程,并在綜合常規(guī)電路設(shè)計(jì)基礎(chǔ)上,結(jié)合考慮各種工作模式下和具體模塊中存在的影響可靠性的因素,最后提出了具有針對(duì)性的電路設(shè)計(jì)解決方案。
中圖分類號(hào): 文獻(xiàn)標(biāo)志碼:A DOI: 10.16157/j.issn.0258-7998.222961
中文引用格式:晏穎,曹玉升,張睿 . eFUSE 失效分析與可靠性電路設(shè)計(jì)[J]. 電子技術(shù)應(yīng)用,XXXX,XX(XX):125-130.
英 文 引 用 格 式 :Yan Ying,Cao Yusheng,Zhang Rui. Failure analysis of eFuse and reliability circuit design[J]. Application of
Electronic Technique,XXXX,XX(XX):125-130.
中文引用格式:晏穎,曹玉升,張睿 . eFUSE 失效分析與可靠性電路設(shè)計(jì)[J]. 電子技術(shù)應(yīng)用,XXXX,XX(XX):125-130.
英 文 引 用 格 式 :Yan Ying,Cao Yusheng,Zhang Rui. Failure analysis of eFuse and reliability circuit design[J]. Application of
Electronic Technique,XXXX,XX(XX):125-130.
Failure analysis of eFuse and reliability circuit design
Yan Ying1,Cao Yusheng1,Zhang Rui2
1.Shanghai Feiju Microelectronic Corporation,Shanghai 201316,China;2.School of Micro-Nano Electronics,ZheJiang Univer‐ sity,HangZhou 310014,China
Abstract: Based on the principle of electron migration, eFuse realizes the programming operation by fusing the fuse to change
its resistance characteristics irreversibly. High reliability is the core goal of eFuse system and circuit optimization design. This paper
starts with the working principle and failure mode analysis of eFuse, and then focuses on the system causes and processes affecting
its reliability. Based on the comprehensive conventional circuit design, combined with the factors affecting reliability in
various working modes and specific modules, finally, a set of targeted circuit design solutions are proposed.
Key words : Failure analysis eFuse reliability circuit design
電編程熔絲(eFUSE)基于電子遷移原理,通過熔斷熔絲使其電阻特性發(fā)生不可逆改變來實(shí)現(xiàn)編程操作。提 高可靠性是 eFUSE 系統(tǒng)和電路優(yōu)化設(shè)計(jì)的核心目標(biāo)。從 eFUSE 工作原理以及失效模式分析入手,重點(diǎn)介紹了影響 其可靠性的系統(tǒng)原因和主要機(jī)理及過程,并在綜合常規(guī)電路設(shè)計(jì)基礎(chǔ)上,結(jié)合考慮各種工作模式下和具體模塊中存 在的影響可靠性的因素,最后提出了具有針對(duì)性的電路設(shè)計(jì)解決方案。
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