中心議題：

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title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" title="MEMS振蕩器">MEMS振蕩器" 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• MEMS振蕩器與石英晶振的比較
• 全硅MEMS三級時鐘方案替代恒溫晶振和溫補晶振

傳統(tǒng)晶振的頻率來自石英。石英晶片施加電場后，晶片會產(chǎn)生機械變形，反之，若施加壓力使石英晶片發(fā)生變形，則在晶片上會產(chǎn)生電場，這就是石英的壓電效應(yīng)。現(xiàn)在，MEMS技術(shù)的應(yīng)用使得MEMS元件可以取代晶振中的石英晶片產(chǎn)生頻率，MEMS振蕩器正在挑戰(zhàn)傳統(tǒng)石英晶振的地位。

MEMS振蕩器的構(gòu)造

晶振的核心的石英晶體切割而成的薄片，MEMS振蕩器的核心是MEMS諧振器。圖1是MEME振蕩器的內(nèi)部構(gòu)造，右邊的MEMS諧振器四邊的梁可以前后振動，從而產(chǎn)生頻率。SiTime是一家提供MEMS全硅時鐘方案的無晶圓廠模擬IC設(shè)計公司。SiTime市場營銷副總裁Piyush Sevalia介紹說，將MEMS諧振器進行真空封裝，然后與一顆模擬IC封裝在一起就可以構(gòu)成一個完整的MEMS振蕩器。相比與石英晶振的金屬或陶瓷封裝，MEMS振蕩器采用低成本的塑料封裝。

 
圖1：MEMS諧振器四邊的梁前后振動產(chǎn)生時鐘頻率

 
圖2：MEMS諧振器與模擬IC集成在一起，可以采用低成本的塑料封裝

SiTime的MEMS時鐘技術(shù)來自博世（Bosch）。2005年，SiTime從博世分拆出來專注于全硅時鐘解決方案。對于MEMS時鐘方案取代石英晶振的意義，Piyush Sevalia認為，這樣的取代如同集成電路取代電子管器件、存儲芯片取代光盤和膠卷一般偉大！

MEMS振蕩器VS石英晶振

基于不同原理，MEMS振蕩器相對石英晶振有一些比較優(yōu)勢：

• 可以集成在內(nèi)部標準塑料封裝中
• 集成實現(xiàn)高精度時鐘 (±5 PPM 至 ±25 PPM)
• 無需任何外部時鐘，簡化了系統(tǒng)設(shè)計
• 無 PCB 布板或 XTAL 匹配問題
• 較低擁有成本

對于較低擁有成本，MEMS振蕩器本身成本比石英晶振低，而且工程師在使用時可以設(shè)置輸出頻率，一顆器件能夠輸出多種頻率，不必像石英晶振一樣，為不同的頻率安裝不同的晶振。Piyush Sevalia介紹說，這一點對于用戶端的工程師和器件生產(chǎn)廠家都是利好。石英晶振在晶片切割時頻率就已經(jīng)固定，無法通用，MEMS振蕩器讓時鐘產(chǎn)品成為標準品一樣的生產(chǎn)和使用。

 
圖3：MEMS振蕩器解決方案不需外部時鐘，簡化了系統(tǒng)設(shè)計

目前，SiTime MEMS振蕩器的批量應(yīng)用市場包括：存儲服務(wù)器、EPON/GPON網(wǎng)關(guān)、計算服務(wù)器、10G交換機、以太網(wǎng)交換機、平板電腦、電子書、筆記本電腦、機頂盒、SSD、基站、MFP、VoIP電話、DVR/CCTV/IP攝像機、DSC、對講機、智能電表、視頻電話、汽車黑匣子等。由于功耗與相位噪聲暫時達不到手機應(yīng)用的要求，所以應(yīng)用在手機中的MEMS振蕩器還在開發(fā)中。Piyush Sevalia介紹說：到2011年9月為止，SiTime已經(jīng)交付了7500萬顆MEMS振蕩器，在MEMS時鐘市場占有85%的市場份額，計劃明年出貨量做到1億顆。電腦OEM 5強中的4家、消費電子OEM 5強中的3家、合同制造商5強中的3家、ODM 5強均已批量使用SiTime的產(chǎn)品。

全硅MEMS三級時鐘方案替代恒溫晶振和溫補晶振

近日，SiTime推出了SiT530x系列全硅MEMS三級時鐘(Stratum 3)解決方案，以替代傳統(tǒng)的恒溫晶振和溫補晶振產(chǎn)品。Yole Développement首席執(zhí)行官和創(chuàng)始人Jean-Christophe Eloy,表示：“MEMS時鐘替代傳統(tǒng)恒溫晶振和溫補晶振產(chǎn)品代表著了一個新的里程碑，因為這在幾年前還被認為是無法通過MEMS時鐘技術(shù)實現(xiàn)的。” 

 
圖4：MEMS三級鐘和傳統(tǒng)OCXO和TCXO三級鐘的比較

SiT5301和SiT5302定位于電信和網(wǎng)絡(luò)基礎(chǔ)設(shè)施，如基于同步光纖網(wǎng)（SONET）和同步以太網(wǎng)的核心及邊緣路由器、無線基站、IP時鐘和智能電網(wǎng)等應(yīng)用。SiT530x系列兼具三級鐘(Stratum 3)穩(wěn)定性、小尺寸、低電壓運行和可編程特性，支持客戶方便快捷地實現(xiàn)產(chǎn)品的差異化和定制。SiTime首席執(zhí)行官Rajesh Vashist表示：“SiTime的革命性技術(shù)能夠集成全硅MEMS和模擬集成電路，從而實現(xiàn)創(chuàng)新解決方案。石英行業(yè)用了幾十年時間才實現(xiàn)該精密度，而SiTime僅用了5年時間便突破了這一性能水平。通過將高性能、低成本和易用性完美結(jié)合，我們已成功使500多家客戶放棄了傳統(tǒng)的石英產(chǎn)品，轉(zhuǎn)而采用我們的產(chǎn)品。”

SiTime代理商艾睿電子全球市場和Asset Management高級副總裁Jeff Eastman指出：“SiTime可編程架構(gòu)可保證艾睿隨時有現(xiàn)貨。我們許多客戶都以在收益于SiTime全硅方案的優(yōu)點。艾睿遍布全球的銷售渠道和SiTime獨一無有的技術(shù)，可使我們更有力更快速在電子市場中全面的推廣SiTime具有創(chuàng)新性的時鐘產(chǎn)品。”